Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory

Sven van Haver; Joseph J. M. Braat; Silvania F. Pereira

doi:10.1117/12.854412

14 May 2010 Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory

Sven van Haver, Joseph J. M. Braat, Silvania F. Pereira

Proceedings Volume 7717, Optical Modelling and Design; 77170U (2010) https://doi.org/10.1117/12.854412
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We propose a measurement approach that allows the determination of aberrations of a microlens by analyzing the through-focus intensity image it produces when the object is a point source. To simulate image formation by a microlens we apply the extended version of the Nijboer-Zernike diffraction theory (ENZ) that uses the Debye diffraction integral to compute the image point-spread function. Due to the aperture size of the microlens and the finite dimensions of the pixels of the electronic detector the Debye diffraction integral should be adapted according to the Li-Wolf scaling rules to yield correct results. In addition to this we also discuss the experimental requirements posed by this characterization approach and derive from this a suitable experimental setup.

Citation Download Citation

Sven van Haver, Joseph J. M. Braat, and Silvania F. Pereira "Enabling aberration retrieval of microlenses with the Extended Nijboer-Zernike (ENZ) diffraction theory", Proc. SPIE 7717, Optical Modelling and Design, 77170U (14 May 2010); https://doi.org/10.1117/12.854412

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