Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS

Jorge Albero; Sylwester Bargiel; Christophe Gorecki; Kay Gastinger

doi:10.1117/12.853907

13 May 2010 Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS

Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Kay Gastinger

Proceedings Volume 7716, Micro-Optics 2010; 771621 (2010) https://doi.org/10.1117/12.853907
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

We present the application of glass microlenses for the fabrication of inspection systems based on interferometric measurements. The microlenses are molded from wet etched silicon by using microfabrication techniques. The concerned system requires lenses to be used in a Mirau interferometer configuration. The principle of the system is presented, as well as different choices of lenses to be integrated. The use of glass microlenses monolithically molded on a substrate is proven as the proper technology to be used in the system.

Citation Download Citation

Jorge Albero, Sylwester Bargiel, Christophe Gorecki, and Kay Gastinger "Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS", Proc. SPIE 7716, Micro-Optics 2010, 771621 (13 May 2010); https://doi.org/10.1117/12.853907

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