Paper
13 May 2010 Refractive x-ray optics made from polymer microstructures
M. Simon, V. Nazmov, E. Reznikova, A. Last, J. Mohr D.D.S., P.-J. Jakobs, V. Saile, O. Bunk, C. Kewish, D. Batchelor, R. Simon
Author Affiliations +
Abstract
Refractive X-ray lenses can be used effectively, to focus or collimate X-rays with photon energies clearly above 10 keV. On the one hand parabolic Compound Refractive Lenses (CRLs) are suitable as imaging optics in high resolution X-ray microscopy. The most recent developments are nanofocusing refractive X-ray lenses (NFLs). These show focal spot sizes of less below 100 nm. On the other hand refractive X-ray lenses can provide a high photon flux when used as large aperture condenser optics. Two types of refractive condenser optics made out of structures with triangular profile have been developed at the Institute for Microstructure Technology (IMT) at the Karlsruhe Institute of Technology (KIT) and have been tested at synchrotron sources in recent years. One type of special interest is the Rolled X-ray Prism Lens (RXPL). These lenses are made of a rolled polymer foil structured with micro grooves with triangular profile. The combination of such condenser optics and NFLs provides a basis for future hard X-ray microscopes.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
M. Simon, V. Nazmov, E. Reznikova, A. Last, J. Mohr D.D.S., P.-J. Jakobs, V. Saile, O. Bunk, C. Kewish, D. Batchelor, and R. Simon "Refractive x-ray optics made from polymer microstructures", Proc. SPIE 7716, Micro-Optics 2010, 77161B (13 May 2010); https://doi.org/10.1117/12.858894
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Cited by 5 scholarly publications.
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KEYWORDS
Lenses

X-rays

Prisms

X-ray optics

X-ray lithography

Polymers

Synchrotron technology

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