Nanostructured metallic surfaces for enhanced transmission and polarization filtering in CMOS fabricated photodetectors

L. A. Dunbar; M. Guillaumée; F. de León-Pérez; P.-F. Rüedi; V. Spassov; R. Eckert; F. Lopez-Tejeira; F. J. García-Vidal; E. Franzi; L. Martín-Moreno; R. P. Stanley

doi:10.1117/12.855286

10 May 2010 Nanostructured metallic surfaces for enhanced transmission and polarization filtering in CMOS fabricated photodetectors

L. A. Dunbar, M. Guillaumée, F. de León-Pérez, P.-F. Rüedi, V. Spassov, R. Eckert, F. Lopez-Tejeira, F. J. García-Vidal, E. Franzi, L. Martín-Moreno, R. P. Stanley

Author Affiliations +

Proceedings Volume 7712, Nanophotonics III; 771239 (2010) https://doi.org/10.1117/12.855286
Event: SPIE Photonics Europe, 2010, Brussels, Belgium

Abstract

The miniaturization of photodetectors often comes at the expense of a smaller photosensitive area. This can reduce the signal and thus limit the image quality. One way to overcome this limitation is to reduce the photosensitive area but with no reduction of signal i.e. harvest the light. Here we investigate, theoretically and experimentally, light harvesting with nanostructured metals. Nanostructured metals can also give additional functionality such as polarization filtering which is also investigated. After defining the figure of merits used when characterizing light harvesting and polarization filtering structures, we detail the fabrication and measurement process. Structures were made on glass substrate, as a post process step on CMOS fabricated detectors and directly in the CMOS fabrication of the detectors. The optical characterization results are presented and compared with theory. Finally, we discuss the challenges and advantages of integrating metallic nanostructures within the CMOS process.

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L. A. Dunbar, M. Guillaumée, F. de León-Pérez, P.-F. Rüedi, V. Spassov, R. Eckert, F. Lopez-Tejeira, F. J. García-Vidal, E. Franzi, L. Martín-Moreno, and R. P. Stanley "Nanostructured metallic surfaces for enhanced transmission and polarization filtering in CMOS fabricated photodetectors", Proc. SPIE 7712, Nanophotonics III, 771239 (10 May 2010); https://doi.org/10.1117/12.855286

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KEYWORDS

Polarization

Sensors

CMOS sensors

Metals

Glasses

Nanolithography

Light harvesting

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