Investigation of microcantilever array with ordered nanoporous coatings for selective chemical detection

J.-H. Lee; R. T. J. Houk; A. Robinson; J. A. Greathouse; S. M. Thornberg; M. D. Allendorf; P. J. Hesketh

doi:10.1117/12.850217

5 May 2010 Investigation of microcantilever array with ordered nanoporous coatings for selective chemical detection

J.-H. Lee, R. T. J. Houk, A. Robinson, J. A. Greathouse, S. M. Thornberg, M. D. Allendorf, P. J. Hesketh

Proceedings Volume 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II; 767927 (2010) https://doi.org/10.1117/12.850217
Event: SPIE Defense, Security, and Sensing, 2010, Orlando, Florida, United States

Abstract

In this paper we demonstrate the potential for novel nanoporous framework materials (NFM) such as metal-organic frameworks (MOFs) to provide selectivity and sensitivity to a broad range of analytes including explosives, nerve agents, and volatile organic compounds (VOCs). NFM are highly ordered, crystalline materials with considerable synthetic flexibility resulting from the presence of both organic and inorganic components within their structure. Detection of chemical weapons of mass destruction (CWMD), explosives, toxic industrial chemicals (TICs), and volatile organic compounds (VOCs) using micro-electro-mechanical-systems (MEMS) devices, such as microcantilevers and surface acoustic wave sensors, requires the use of recognition layers to impart selectivity. Traditional organic polymers are dense, impeding analyte uptake and slowing sensor response. The nanoporosity and ultrahigh surface areas of NFM enhance transport into and out of the NFM layer, improving response times, and their ordered structure enables structural tuning to impart selectivity. Here we describe experiments and modeling aimed at creating NFM layers tailored to the detection of water vapor, explosives, CWMD, and VOCs, and their integration with the surfaces of MEMS devices. Force field models show that a high degree of chemical selectivity is feasible. For example, using a suite of MOFs it should be possible to select for explosives vs. CWMD, VM vs. GA (nerve agents), and anthracene vs. naphthalene (VOCs). We will also demonstrate the integration of various NFM with the surfaces of MEMS devices and describe new synthetic methods developed to improve the quality of VFM coatings. Finally, MOF-coated MEMS devices show how temperature changes can be tuned to improve response times, selectivity, and sensitivity.

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J.-H. Lee, R. T. J. Houk, A. Robinson, J. A. Greathouse, S. M. Thornberg, M. D. Allendorf, and P. J. Hesketh "Investigation of microcantilever array with ordered nanoporous coatings for selective chemical detection", Proc. SPIE 7679, Micro- and Nanotechnology Sensors, Systems, and Applications II, 767927 (5 May 2010); https://doi.org/10.1117/12.850217

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