A back-illuminated heterojunctions ultraviolet photodetector based on ZnO film

Xiandong Jiang; Dawei Li; Wenjun Yang; Jiming Wang; Xu Lin; Ziqiang Huang

doi:10.1117/12.867893

22 October 2010 A back-illuminated heterojunctions ultraviolet photodetector based on ZnO film

Xiandong Jiang, Dawei Li, Wenjun Yang, Jiming Wang, Xu Lin, Ziqiang Huang

Proceedings Volume 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology; 76584M (2010) https://doi.org/10.1117/12.867893
Event: 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies, 2010, Dalian, China

Abstract

In this paper, we present the investigation of a back-illuminated heterojunctions ultraviolet detector, which were fabricated by depositing Ag-doped ZnO based (ZnO-TiO₂) thin film on transparent conductive layer of ITO coated quartz substrate though the reactive radio-frequency (RF) magnetron sputtering at higher oxygen pressure. The p-n junction characteristic is confirmed by current-voltage (I-V) measurements. The turn-on voltage was 6 V, with a low leakage current under reverse bias (-5 V), corresponding values was just 0.2 nA . It is clearly showed the rectifying characteristics of typical p-n junction's rectifier behaviors. The structural, component and UV (365 nm, 1400 μW/cm²) photoresponse properties were explored by X-ray diffraction (XRD), Scanning Electron Microscope (SEM), X-ray energy dispersive spectrometer (EDS) and Tektronix oscilloscope. The results showed that: Ag in substitution form in the ZnO lattice, Ag doping concentration is low, the sample is highly c-axis preferred orientation, With the increase in doped Ag volume, ZnO film of 002 peaks no longer appear. The surface of the Ag doped ZnO based film exhibits a smooth surface and very dense structure, no visible pores and defects over the film were observed.The ultraviolet response time measurements showed rise and fall time are several seconds Level.

Citation Download Citation

Xiandong Jiang, Dawei Li, Wenjun Yang, Jiming Wang, Xu Lin, and Ziqiang Huang "A back-illuminated heterojunctions ultraviolet photodetector based on ZnO film", Proc. SPIE 7658, 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optoelectronic Materials and Devices for Detector, Imager, Display, and Energy Conversion Technology, 76584M (22 October 2010); https://doi.org/10.1117/12.867893

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KEYWORDS

Zinc oxide

Ultraviolet radiation

Silver

Thin films

Heterojunctions

Ultraviolet detectors

Oxygen

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