After development inspection defectivity studies of an advanced memory device

Hyung-Seop Kim; Byoung-Ho Lee; Eric Ma; Fei Wang; Yan Zhao; Kenichi Kanai; Hong Xiao; Jack Jau

doi:10.1117/12.848066

1 April 2010 After development inspection defectivity studies of an advanced memory device

Hyung-Seop Kim, Byoung-Ho Lee, Eric Ma, Fei Wang, Yan Zhao, Kenichi Kanai, Hong Xiao, Jack Jau

Proceedings Volume 7638, Metrology, Inspection, and Process Control for Microlithography XXIV; 76380L (2010) https://doi.org/10.1117/12.848066
Event: SPIE Advanced Lithography, 2010, San Jose, California, United States

Abstract

In this study, a 3x-nm after development inspection (ADI) wafer with focus exposure matrix (FEM) was inspected with both an advanced optical system and an advanced electron beam inspection (EBI) system, and the inspection results were carefully examined. We found that EBI can capture much more defects than optical system and it also can provide more information about within reticle shot defect distribution. It has high capture rate of certain critical defects that are insensitive to optical system, such as nano-bridges. We also studied the critical dimension (CD) variations caused by the optical inspection and EBI.

Citation Download Citation

Hyung-Seop Kim, Byoung-Ho Lee, Eric Ma, Fei Wang, Yan Zhao, Kenichi Kanai, Hong Xiao, and Jack Jau "After development inspection defectivity studies of an advanced memory device", Proc. SPIE 7638, Metrology, Inspection, and Process Control for Microlithography XXIV, 76380L (1 April 2010); https://doi.org/10.1117/12.848066

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available