Nanopatterned optical and magnetic La0.7Sr0.3MnO3 arrays: synthesis, fabrication, and properties

Ming-Chung Wu; Chih-Min Chuang; Yu-Ching Huang; Yi-Jen Wu; Kuo-Chung Cheng; Ching-Fuh Lin; Yang-Fang Chen; Wei-Fang Su

doi:10.1117/12.845257

15 February 2010 Nanopatterned optical and magnetic La_0.7Sr_0.3MnO₃ arrays: synthesis, fabrication, and properties

Ming-Chung Wu, Chih-Min Chuang, Yu-Ching Huang, Yi-Jen Wu, Kuo-Chung Cheng, Ching-Fuh Lin, Yang-Fang Chen, Wei-Fang Su

Proceedings Volume 7603, Oxide-based Materials and Devices; 76031H (2010) https://doi.org/10.1117/12.845257
Event: SPIE OPTO, 2010, San Francisco, California, United States

Abstract

In the past few years, we have fabricated nanoscale La_0.7Sr_0.3MnO₃ periodic arrays with unique optical and magnetic properties successfully. These periodic patterns were made by La_0.7Sr_0.3MnO₃ resist that can be developed under a nontoxic and environmental friendly manner using pure water. The resist is also capable to exhibit both positive and negative resist behaviors depending on the electron beam dosage. Thus, these special characteristics are used to fabricate and tune periodic structure thin film having controlled optical reflectance properties in the wavelength of 300 nm to 800 nm with one fixed design electron beam pattern by simply changing the electron beam dosage only. Additionally, the magnetization of La_0.7Sr_0.3MnO₃ patterns can be enhanced by post sintering the sample at 900 °C after electron beam irradiation. Therefore, our study provides a one-step, simple, and convenient alternative technique for the fabrication of tunable optical structure and nanoscale magnetic patterns, which form the building blocks for the study of optoelectronic and magnetic devices in nanoscale periodic arrays.

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Ming-Chung Wu, Chih-Min Chuang, Yu-Ching Huang, Yi-Jen Wu, Kuo-Chung Cheng, Ching-Fuh Lin, Yang-Fang Chen, and Wei-Fang Su "Nanopatterned optical and magnetic La_0.7Sr_0.3MnO₃ arrays: synthesis, fabrication, and properties", Proc. SPIE 7603, Oxide-based Materials and Devices, 76031H (15 February 2010); https://doi.org/10.1117/12.845257

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