A novel free-space MEMS-based variable optical delay line

M. A. Basha; N. Dechev; S. Safavi-Naeini; S. Chaudhuri

doi:10.1117/12.847197

17 February 2010 A novel free-space MEMS-based variable optical delay line

M. A. Basha, N. Dechev, S. Safavi-Naeini, S. Chaudhuri

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759410 (2010) https://doi.org/10.1117/12.847197
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

This paper describes a novel design for a variable optical delay line (ODL) based on modified version of a recently developed MEMS-based 3-D rotating inclined micromirror (3DRIM). The 3DRIM is created by assembling a micromirror onto the top of a rotary comb-drive motor. The comb-drive motor is able to achieve a few degrees of rotation. The new ODL architecture uses two such 3DRIMs located inside a rectangular cavity with mirrored walls. Light from an input fiber is redirected by the 3DRIMs, and caused to reflect within the cavity a number of times, depending on the rotational angle of the 3DRIMs. In this way, the ODL can achieve variable optical delays of up to 3.7 nsec.

Citation Download Citation

M. A. Basha, N. Dechev, S. Safavi-Naeini, and S. Chaudhuri "A novel free-space MEMS-based variable optical delay line", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759410 (17 February 2010); https://doi.org/10.1117/12.847197

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