High-speed liquid lens with 2-ms response and 80.3-nm root-mean-square wavefront error

Hiromasa Oku; Masatoshi Ishikawa

doi:10.1117/12.840855

16 February 2010 High-speed liquid lens with 2-ms response and 80.3-nm root-mean-square wavefront error

Hiromasa Oku, Masatoshi Ishikawa

Proceedings Volume 7594, MOEMS and Miniaturized Systems IX; 759407 (2010) https://doi.org/10.1117/12.840855
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

A liquid lens structure with a step response time of 2 ms, a refractive power range of 52 D, and a root-meansquare (RMS) wavefront error of 80.3 nm is reported. This lens uses a liquid-liquid interface with a pinned contact line as a variable refractive surface, and its shape is controlled by a piezo stack actuator via a built-in hydraulic amplifier. The potential applications of this device include axial focus scanning of microscopes and focusing/zooming of camera lenses and machine vision systems.

Citation Download Citation

Hiromasa Oku and Masatoshi Ishikawa "High-speed liquid lens with 2-ms response and 80.3-nm root-mean-square wavefront error", Proc. SPIE 7594, MOEMS and Miniaturized Systems IX, 759407 (16 February 2010); https://doi.org/10.1117/12.840855

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