Mitigating the irreversible deformation with pressure in silicon/porous silicon composite membranes

L. Sujatha; Rahul Goswami; Enakshi Bhattacharya

doi:10.1117/12.846480

4 February 2010 Mitigating the irreversible deformation with pressure in silicon/porous silicon composite membranes

L. Sujatha, Rahul Goswami, Enakshi Bhattacharya

Proceedings Volume 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX; 75920W (2010) https://doi.org/10.1117/12.846480
Event: SPIE MOEMS-MEMS, 2010, San Francisco, California, United States

Abstract

Due to the low Young's Modulus of porous silicon (PS), Si/PS composite membranes - where the silicon membrane is converted into PS to a certain depth - deform more than silicon membranes and hence MEMS pressure sensors with composite membranes have higher sensitivity. But the Si/PS composite membranes exhibit a smaller range of linear response with applied pressure than silicon membranes with the linear range being less for Si/microPS as compared to Si/macroPS composite membranes. In addition, while the composite membrane deformation saturates at high pressures like silicon membranes, the deformation is irreversible unlike that seen with silicon membranes within reasonable limits. With the possibility that the irreversible deformation could be due to stiction force between the collapsed pore walls at high pressure, we investigate the effect of formation of self-assembled monolayer (SAM) antistiction coating on the performance of Si/PS composite membranes.

Citation Download Citation

L. Sujatha, Rahul Goswami, and Enakshi Bhattacharya "Mitigating the irreversible deformation with pressure in silicon/porous silicon composite membranes", Proc. SPIE 7592, Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices IX, 75920W (4 February 2010); https://doi.org/10.1117/12.846480

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available