Paper
16 February 2010 Coaxial real-time metrology and gas assisted laser micromachining: process development, stochastic behavior, and feedback control
Paul J. L. Webster, Ben Y. C. Leung, Joe X. Z. Yu, Mitchell D. Anderson, Tony P. Hoult, James M. Fraser
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Abstract
The stochastic effects of assist gas in QCW and pulsed laser machining (percussion drilling) in steel are measured with a novel in situ high speed low coherence imaging system. Real-time imaging is delivered coaxially with machining energy and assist gas revealing relaxation and melt flow dynamics over microsecond timescales and millimeter length scales with ~10 micrometer resolution. Direct measurement of cut rate and repeatability avoids post cut analysis and iterative process development. Feedback from the imaging system can be used to overcome variations in relaxation and guides blind hole cutting.
© (2010) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Paul J. L. Webster, Ben Y. C. Leung, Joe X. Z. Yu, Mitchell D. Anderson, Tony P. Hoult, and James M. Fraser "Coaxial real-time metrology and gas assisted laser micromachining: process development, stochastic behavior, and feedback control", Proc. SPIE 7590, Micromachining and Microfabrication Process Technology XV, 759003 (16 February 2010); https://doi.org/10.1117/12.842409
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CITATIONS
Cited by 14 scholarly publications and 1 patent.
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KEYWORDS
Imaging systems

Stochastic processes

Gas lasers

Interfaces

Fiber lasers

Laser cutting

Micromachining

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