Analysis of cylindrical subwavelength diffractive optical elements by an approximate vectorial diffraction method

Jia-sheng Ye; Yan Zhang

doi:10.1117/12.838034

20 November 2009 Analysis of cylindrical subwavelength diffractive optical elements by an approximate vectorial diffraction method

Jia-sheng Ye, Yan Zhang

Author Affiliations +

Proceedings Volume 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications; 751009 (2009) https://doi.org/10.1117/12.838034
Event: International Conference on Optical Instrumentation and Technology, 2009, Shanghai, China

Abstract

Vectorial diffraction methods provide accurate analysis of subwavelength diffractive optical elements, but they usually consume a lot of computing time and computer memory. On the other hand, scalar diffraction methods have simpler physical models and cost much less computer resources at the expense of a large numerical error. Therefore, an approximate method is highly required, which can substantially relieve the computational burden and possess a high accuracy. We firstly propose such an approximate vectorial method, i.e., the improved first Rayleigh-Sommerfeld method (IRSM1), and apply it to analysis of two-dimensional (2-D) cylindrical microlenses and metallic cylindrical focusing micromirrors. The IRSM1 is clearly proved to be much more accurate than the scalar diffraction method. In addition, compared with the vectorial boundary element method, the IRSM1 consumes much less computing time and computer memory. Besides of the above, the IRSM1 is expected to be used in optical designs of subwavelength diffractive optical elements by incorporating with the simulated annealing method or the Yang-Gu algorithm.

Citation Download Citation

Jia-sheng Ye and Yan Zhang "Analysis of cylindrical subwavelength diffractive optical elements by an approximate vectorial diffraction method", Proc. SPIE 7510, 2009 International Conference on Optical Instruments and Technology: MEMS/NEMS Technology and Applications, 751009 (20 November 2009); https://doi.org/10.1117/12.838034

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KEYWORDS

Microlens

Micromirrors

Diffraction

Error analysis

Diffractive optical elements

Quantization

Polarization

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