Paper
31 December 2009 Development of large size MgF2 single crystal grown by the CZ method
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Abstract
In the semiconductor lithography technology, the polarized illumination system is applied to make the resolution more microscopic, therefore the polarizer material with excellent durability against the high power ArF laser has been required. Magnesium fluoride (MgF2) is one of a suitable material because of its laser durability and high transparency in VUV region. Previously we reported MgF2 single crystal with diameter of 100mm by using the Czochralski (CZ) method. By optimizing the crystal growth conditions, MgF2 single crystals with over 150mm in diameter have been stably grown. Also these crystals show good optical properties and crystallinity.
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Masao Ariyuki, Yasuhiro Hashimoto, Naoto Mochizuki, Yoji Inui, Isao Masada, Teruhiko Nawata, and Tsuguo Fukuda "Development of large size MgF2 single crystal grown by the CZ method", Proc. SPIE 7504, Laser-Induced Damage in Optical Materials: 2009, 75041Q (31 December 2009); https://doi.org/10.1117/12.836349
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KEYWORDS
Crystals

Magnesium fluoride

Transmittance

Vacuum ultraviolet

Laser crystals

Polarizers

Transparency

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