SiC/Al multilayers for normal incidence EUV applications

David L. Windt; Jeffrey A. Bellotti

doi:10.1117/12.824630

31 August 2009 SiC/Al multilayers for normal incidence EUV applications

David L. Windt, Jeffrey A. Bellotti

Proceedings Volume 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV; 743714 (2009) https://doi.org/10.1117/12.824630
Event: SPIE Optical Engineering + Applications, 2009, San Diego, California, United States

Abstract

We have investigated the performance, structure and stability of periodic multilayer films containing silicon carbide (SiC) and aluminum (Al) layers designed for use as reflective coatings in the extreme ultraviolet (EUV). We find that SiC/Al multilayers prepared by magnetron sputtering have low stress, good temporal and thermal stability, and provide good performance in the EUV, particularly for applications requiring a narrow spectral bandpass such as monochromatic solar imaging. Transmission electron microscopy reveals amorphous SiC layers and polycrystalline Al layers having a strong <111> texture, and relatively large roughness associated with the Al crystallites. Fits to EUV reflectance measurements also indicate large interface widths, consistent with the electron microscopy results. SiC/Al multilayers deposited by reactive sputtering with nitrogen comprise Al layers that are nearly amorphous and considerably smoother than films deposited non-reactively, but no improvements in EUV reflectance were obtained.

Citation Download Citation

David L. Windt and Jeffrey A. Bellotti "SiC/Al multilayers for normal incidence EUV applications", Proc. SPIE 7437, Optics for EUV, X-Ray, and Gamma-Ray Astronomy IV, 743714 (31 August 2009); https://doi.org/10.1117/12.824630

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available