Traceability of the F25 vision system for calibration of grated structures with submicron accuracy

Ancuta I. Mares; Rob H. Bergmans; Gerard J. W. L Kotte; Rutger R. Tromp

doi:10.1117/12.827545

17 June 2009 Traceability of the F25 vision system for calibration of grated structures with submicron accuracyv

Ancuta I. Mares, Rob H. Bergmans, Gerard J. W. L Kotte, Rutger R. Tromp

Proceedings Volume 7390, Modeling Aspects in Optical Metrology II; 739004 (2009) https://doi.org/10.1117/12.827545
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We have investigated the uncertainty sources that affect the traceability of dimensional measurements using the VIScan of the Zeiss F25 coordinate measuring machine (CMM). Our experimental results on line-width measurements are promising, having a repeatability below 120 nm and moreover they are reproducible for all light settings investigated. The comparison with the measurements performed on a facility used for line-scale calibrations provides very good agreement. At present we can report an uncertainty below 0.45 μm for line-width calibrations. This would be the first traceable F25 VIScan, and to our knowledge one of the first truly traceable vision systems for line-width calibrations.

Citation Download Citation

Ancuta I. Mares, Rob H. Bergmans, Gerard J. W. L Kotte, and Rutger R. Tromp "Traceability of the F25 vision system for calibration of grated structures with submicron accuracyv", Proc. SPIE 7390, Modeling Aspects in Optical Metrology II, 739004 (17 June 2009); https://doi.org/10.1117/12.827545

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