3D shape measurement using curvature data

ByoungChang Kim; MinChel Kwon; ByoungUck Choo; InJeong Yoon

doi:10.1117/12.827242

17 June 2009 3D shape measurement using curvature data

ByoungChang Kim, MinChel Kwon, ByoungUck Choo, InJeong Yoon

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73892H (2009) https://doi.org/10.1117/12.827242
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

We present a method of three dimensional shape measurement from the curvature data, which are obtained from the subaperture topography along the diagonal direction of artifact by using white-light scanning interferometry. The curvature is an intrinsic property of the artifact, which does not depend on the positioning errors of measuring sensor. Experimental results prove that the proposed method is useful, especially for large-scale optical surface profile measurement with nanometer accuracy. The current version of this paper has had a correction made to it at the request of the author. Please see the linked Errata for further details.

Citation Download Citation

ByoungChang Kim, MinChel Kwon, ByoungUck Choo, and InJeong Yoon "3D shape measurement using curvature data", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892H (17 June 2009); https://doi.org/10.1117/12.827242

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