Wavelength-modulated heterodyne speckle interferometry for displacement measurement

Ju-Yi Lee; Kun-Yi Lin; Szu-Han Huang

doi:10.1117/12.827047

17 June 2009 Wavelength-modulated heterodyne speckle interferometry for displacement measurement

Ju-Yi Lee, Kun-Yi Lin, Szu-Han Huang

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 73892G (2009) https://doi.org/10.1117/12.827047
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A heterodyne speckle interferometry for measurement of in-plane displacement is proposed. The wavelength-modulated (WM) laser beam passing through an unequal-path-length optical configuration is used as a heterodyne light source. The scattering heterodyne speckle signal is received by letting the WM heterodyne light incidents on the in-plane moving rough surface. The object displacement would be determined by the speckle interferometry theorem with the measured phase variation of the heterodyne speckle signal. The experimental results demonstrate that the measurement range is up to 10 μm and resolution is about 10 nm.

Citation Download Citation

Ju-Yi Lee, Kun-Yi Lin, and Szu-Han Huang "Wavelength-modulated heterodyne speckle interferometry for displacement measurement", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 73892G (17 June 2009); https://doi.org/10.1117/12.827047

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