Non-metal elemental analysis by a compact low-energy high-repetition rate laser-induced-breakdown spectrometer

Christian Wagner; Johannes Ewald; Georg Ankerhold; Peter Kohns

doi:10.1117/12.825054

17 June 2009 Non-metal elemental analysis by a compact low-energy high-repetition rate laser-induced-breakdown spectrometer

Christian Wagner, Johannes Ewald, Georg Ankerhold, Peter Kohns

Author Affiliations +

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 738929 (2009) https://doi.org/10.1117/12.825054
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

A compact laser-induced-breakdown-spectroscopy (LIBS) system for surface elemental analysis using a low-energy, high-repetition rate Nd:YAG laser as excitation source has been developed. Elemental analyses were performed on various samples including non-metallic compounds and metal alloys. Fluorine and chlorine could be detected well qualitatively in different organic materials like Teflon FEP (fluorinated ethylene propylene) or PVC (polyvinyl chloride). Furthermore, low concentrations of silicon, magnesium and copper in aluminum have been measured and could be backed up by EDX and XPS analysis. Results were confirmed with a conventional LIBS system using a high-energy, low-repetition rate Nd:YAG SHG laser operating at 10 Hz with a pulse energy of 200 mJ. Especially the results with fluorine containing samples are very promising and show that LIBS measurements of non-metallic samples are possible even at very low pulse energies with a manageable trade-off in signal strength.

Citation Download Citation

Christian Wagner, Johannes Ewald, Georg Ankerhold, and Peter Kohns "Non-metal elemental analysis by a compact low-energy high-repetition rate laser-induced-breakdown spectrometer", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738929 (17 June 2009); https://doi.org/10.1117/12.825054

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