Surface profile analysis using a fiber optic low-coherence interferometer

Robert Schmitt; Niels König; Elisa Manfrin de Araújo

doi:10.1117/12.827823

17 June 2009 Surface profile analysis using a fiber optic low-coherence interferometer

Robert Schmitt, Niels König, Elisa Manfrin de Araújo

Proceedings Volume 7389, Optical Measurement Systems for Industrial Inspection VI; 738914 (2009) https://doi.org/10.1117/12.827823
Event: SPIE Europe Optical Metrology, 2009, Munich, Germany

Abstract

Several optical measurement principles have proven their potential for high-resolution surface measurements. Among a few others, white-light interferometry has proven its capability for the measurement of technical surfaces, but yet, white-light interferometer systems cannot be miniaturized enough e.g. for the measurement inside small boreholes. In this work, a fiber-optic measurement system is described. Since the measuring principle is based on lowcoherence interferometry (LCI), the system provides non-contact surface measurements with nanometer accuracy. We present a system set-up for surface profile acquisition as well as the application of the system for the determination of roughness and waviness parameters. An outstanding feature of the proposed system is the miniaturized fiber-optic sensing probe, which is built up in all-fiber design. With a probe diameter down to 800 μm, the system can be used for measurements inside small cavities, e.g. bearings or injection nozzles. Beam shaping is realized with graded-index (GRIN) fibers. Conclusively, the results of evaluation measurements are compared with ISO 5436-1 type A and D measurement standards.

Citation Download Citation

Robert Schmitt, Niels König, and Elisa Manfrin de Araújo "Surface profile analysis using a fiber optic low-coherence interferometer", Proc. SPIE 7389, Optical Measurement Systems for Industrial Inspection VI, 738914 (17 June 2009); https://doi.org/10.1117/12.827823

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