A self-mixing laser sensor for the real-time correction of straightness/flatness deviations of a linear slide

Simona Ottonelli; Maurizio Dabbicco; Francesco De Lucia; Gaetano Scamarcio

doi:10.1117/12.820438

18 May 2009 A self-mixing laser sensor for the real-time correction of straightness/flatness deviations of a linear slide

Simona Ottonelli, Maurizio Dabbicco, Francesco De Lucia, Gaetano Scamarcio

Author Affiliations +

Proceedings Volume 7356, Optical Sensors 2009; 73560Q (2009) https://doi.org/10.1117/12.820438
Event: SPIE Optics + Optoelectronics, 2009, Prague, Czech Republic

Abstract

The development of a contactless sensor based on the Laser-Self-Mixing effect for the simultaneous measurement of linear and transverse degrees-of-freedom (DOFs) of a moving target is described in this paper. The sensor is made of three laser diodes with integrated monitor photodiodes, and a properly designed reflective target attached to the moving object. The proposed technique exploits the differential measurement of linear displacements by two identical self-mixing interferometers (SMIs) and makes the system more compact and easier to align with respect to traditional interferometric systems, thus providing an effective low-cost motion control system. The feasibility of the proposed sensor is experimentally demonstrated over a range of 1 m for linear motion and ± 6 mm for transverse displacements, with resolutions of 0.7 μm and 20 μm, respectively.

Citation Download Citation

Simona Ottonelli, Maurizio Dabbicco, Francesco De Lucia, and Gaetano Scamarcio "A self-mixing laser sensor for the real-time correction of straightness/flatness deviations of a linear slide", Proc. SPIE 7356, Optical Sensors 2009, 73560Q (18 May 2009); https://doi.org/10.1117/12.820438

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