MEMS-based Fabry-Perot microspectrometers for agriculture

John M. Dell; Jason S. Milne; Jarek Antoszewski; Adrian J. Keating; Leo P. Schuler; Lorenzo Faraone

doi:10.1117/12.819909

28 April 2009 MEMS-based Fabry-Perot microspectrometers for agriculture

John M. Dell, Jason S. Milne, Jarek Antoszewski, Adrian J. Keating, Leo P. Schuler, Lorenzo Faraone

Proceedings Volume 7319, Next-Generation Spectroscopic Technologies II; 73190K (2009) https://doi.org/10.1117/12.819909
Event: SPIE Defense, Security, and Sensing, 2009, Orlando, Florida, United States

Abstract

This paper reports work on the development of rugged micro-electromechanical systems (MEMS)-based microspectrometers for real-time applications in agriculture. The devices are electrostatically actuated, first order Fabry- Perot tuneable optical filters, hybridised with InGaAs photodiode detectors. Tuning range and resolution of the devices are 1615 nm to 2425 nm and 52 nm (FWHM) at 2000 nm, respectively. To our knowledge, this tuning range is the largest reported for a MEMS-based Fabry-Perot filter. Three-layer distributed Bragg reflectors are used for the Fabry- Perot mirrors, and consist of e-beam evaporated layers of germanium - silicon monoxide - germanium. The moveable mirror also includes two silicon nitride layers that act as the MEMS flexures, stress compensation layers, and as an encapsulant for the mirror layers. The spectral resolution matches the theoretical expected for the mirror structures used when the residual bowing of the mirror (~15 nm across a diameter of 70 μm) is included, and can be improved to ~10 nm if five layer mirrors are used. The out of band rejection is approximately 20 dB. Experimental results show that the throughput of the device is sufficient to allow transmittance, specular reflectance and diffuse reflectance spectra to be measured. The primary outstanding issue is wavelength calibration, and is being addressed using a number of approaches including incorporation of wavelength calibration standards in the hybrid structure and accurate, real-time measurement of the separation of the two mirrors.

Citation Download Citation

John M. Dell, Jason S. Milne, Jarek Antoszewski, Adrian J. Keating, Leo P. Schuler, and Lorenzo Faraone "MEMS-based Fabry-Perot microspectrometers for agriculture", Proc. SPIE 7319, Next-Generation Spectroscopic Technologies II, 73190K (28 April 2009); https://doi.org/10.1117/12.819909

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