Preparation of titanium dioxide films by sol-gel route for gas sensors

Vasilica Schiopu; Alina Matei; Ileana Cernica; Cecilia Podaru

doi:10.1117/12.823632

7 January 2009 Preparation of titanium dioxide films by sol-gel route for gas sensors

Vasilica Schiopu, Alina Matei, Ileana Cernica, Cecilia Podaru

Proceedings Volume 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV; 72970M (2009) https://doi.org/10.1117/12.823632
Event: Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 2008, Constanta, Romania

Abstract

Semiconductor oxides such as SnO₂, TiO₂, WO₃, ZnO₂ etc. have been shown to be useful as gas sensor materials for monitoring various pollutant gases like H₂S, NO_x, NH₃ etc. In this work, we would like to present the preparation of titanium dioxide films for gas sensor application, via the sol-gel technique. The coating solution was prepared by using titanium isopropoxide precursor, which was hydrolyzed with distilled water under the catalytic effect of different acids (HNO₃, HCl or CH₃COOH). Titanium dioxide films have been deposited using spin coating method and then synthesized at different temperatures. Fourier transform infrared spectroscopy observation has been used to analyze the sol-gel process. The morphology and the structure of the thin films were analyzed.

Citation Download Citation

Vasilica Schiopu, Alina Matei, Ileana Cernica, and Cecilia Podaru "Preparation of titanium dioxide films by sol-gel route for gas sensors", Proc. SPIE 7297, Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV, 72970M (7 January 2009); https://doi.org/10.1117/12.823632

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