Design and fabrication of inverted rib waveguide Bragg grating

Cheng-Sheng Huang; Wei-Chih Wang

doi:10.1117/12.816543

31 March 2009 Design and fabrication of inverted rib waveguide Bragg grating

Cheng-Sheng Huang, Wei-Chih Wang

Proceedings Volume 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009; 72910R (2009) https://doi.org/10.1117/12.816543
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

A polymeric SU8 rib waveguide Bragg grating filterfabricated using reactive ion etching (RIE) and solvent assisted microcontact molding (SAMIM) is presented. SAMIM is one kind of soft lithography. The technique is unique in which that a composite hPDMS/PDMS stamp was used to transfer the grating pattern onto an inverted SU8 rib waveguide system. The composite grating stamp can be used repeatedly several times with degradation. Using this stamp and inverter rib waveguide structure, the Bragg grating filter fabrication can be significantly simplified.

Citation Download Citation

Cheng-Sheng Huang and Wei-Chih Wang "Design and fabrication of inverted rib waveguide Bragg grating", Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910R (31 March 2009); https://doi.org/10.1117/12.816543

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