High quality factor integrated passive devices for microwave and millimeter wave applications

Tauno Vähä-Heikkilä

doi:10.1117/12.815263

31 March 2009 High quality factor integrated passive devices for microwave and millimeter wave applications

Tauno Vähä-Heikkilä

Proceedings Volume 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009; 72910E (2009) https://doi.org/10.1117/12.815263
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2009, San Diego, California, United States

Abstract

A fabrication process and multi project wafer run (MPW) service has been developed for realizing integrated passive devices. The fabrication process is simple and low cost ranging applications from consumer electronics to instrumentation and measurement as well as defense and scientific applications. The fabrication process is offered as an MPW service for all types of organizations being suitable for scientific experiments, product prototyping or optimization. The technology has used for realizing microwave and millimeter wave components. Measured result show that the technology as well as accurate design result in loss less than 1.1 dB at 60 GHz for an integrated band-pass filter.

Citation Download Citation

Tauno Vähä-Heikkilä "High quality factor integrated passive devices for microwave and millimeter wave applications", Proc. SPIE 7291, Nanosensors, Biosensors, and Info-Tech Sensors and Systems 2009, 72910E (31 March 2009); https://doi.org/10.1117/12.815263

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KEYWORDS

Copper

Extremely high frequency

Metals

Microwave radiation

Bandpass filters

Semiconducting wafers

Photography

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