Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film

Weidong Gao

doi:10.1117/12.828718

20 May 2009 Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film

Weidong Gao

Proceedings Volume 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment; 72832L (2009) https://doi.org/10.1117/12.828718
Event: AOMATT 2008 - 4th International Symposium on Advanced Optical Manufacturing, 2008, Chengdu, Chengdu, China

Abstract

Optical constants of vacuum-deposited Zinc selenide (ZnSe) film from far infrared to near ultraviolet spectral region (270nm-30μm) have been determined by variable angle spectroscopic ellipsometry. The surface roughness layer and interface layer between ZnSe film and crystalline silicon have been modeled with Bruggeman effective medium approximation (BEMA). To evaluate the microstructure of ZnSe film, X-ray diffraction (XRD) measurements are also performed.

Citation Download Citation

Weidong Gao "Spectroscopic ellipsometry studies on vacuum-evaporated zinc selenide thin film", Proc. SPIE 7283, 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 72832L (20 May 2009); https://doi.org/10.1117/12.828718

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