Ge-on-silicon vertical PIN photodetectors

Johann Osmond; Laurent Vivien; Jean-Marc Fédéli; Delphine Marris-Morini; Paul Crozat; Jean-François Damlencourt; Eric Cassan; Juliette Mangeney; Yves Lecunff; Suzanne Laval

doi:10.1117/12.807947

17 February 2009 Ge-on-silicon vertical PIN photodetectors

Johann Osmond, Laurent Vivien, Jean-Marc Fédéli, Delphine Marris-Morini, Paul Crozat, Jean-François Damlencourt, Eric Cassan, Juliette Mangeney, Yves Lecunff, Suzanne Laval

Author Affiliations +

Proceedings Volume 7220, Silicon Photonics IV; 72200F (2009) https://doi.org/10.1117/12.807947
Event: SPIE OPTO: Integrated Optoelectronic Devices, 2009, San Jose, California, United States

Abstract

This paper reports on fabrication and characterization of two kinds of photodetectors: surface illuminated and waveguide integrated vertical PIN Ge/Si photodetectors for operation at optical telecommunication wavelengths. The measured -3dB bandwidth of surface illuminated photodetectors is 40 GHz under 5 V reverse bias at 1.53 µm wavelength. For waveguide integrated photodetectors, the measured -3dB bandwidth at 1.53 µm wavelength under 4 V reverse bias is 42 GHz.

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Johann Osmond, Laurent Vivien, Jean-Marc Fédéli, Delphine Marris-Morini, Paul Crozat, Jean-François Damlencourt, Eric Cassan, Juliette Mangeney, Yves Lecunff, and Suzanne Laval "Ge-on-silicon vertical PIN photodetectors", Proc. SPIE 7220, Silicon Photonics IV, 72200F (17 February 2009); https://doi.org/10.1117/12.807947

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