Empirical study of OPC metrology requirements for 32-nm node logic

Brian S. Ward; Lena Zavylova; Peter de Bisschop; Jeroen van de Kerkhove

doi:10.1117/12.801458

17 October 2008 Empirical study of OPC metrology requirements for 32-nm node logic

Brian S. Ward, Lena Zavylova, Peter de Bisschop, Jeroen van de Kerkhove

Proceedings Volume 7122, Photomask Technology 2008; 712242 (2008) https://doi.org/10.1117/12.801458
Event: SPIE Photomask Technology, 2008, Monterey, California, United States

Abstract

We evaluate the relationship between the number of measurements used to create each data point in an OPC model data set and resulting model quality for target 32-nm logic node applications. Generated data sets will range from singlemeasurement, unfiltered data sets to many-measurement averages based on filtered results. Intermediate measurementcount averages will also be evaluated in an attempt to quantify the tradeoff between raw measurements per data point and resulting model quality. Finally, other variations will also be considered, such as automated versus manual data filtering. The auto-fitted OPC models will be compared to identify metrology recommendations for 32-nm logic node modeling.

Citation Download Citation

Brian S. Ward, Lena Zavylova, Peter de Bisschop, and Jeroen van de Kerkhove "Empirical study of OPC metrology requirements for 32-nm node logic", Proc. SPIE 7122, Photomask Technology 2008, 712242 (17 October 2008); https://doi.org/10.1117/12.801458

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available