AZO films prepared by r.f. magnetron sputtering: structural, electrical, and optical properties

Maria Luisa Grilli; Anna Krasilnikova Sytchkova; Sylvia Boycheva; Angela Piegari

doi:10.1117/12.797665

25 September 2008 AZO films prepared by r.f. magnetron sputtering: structural, electrical, and optical properties

Maria Luisa Grilli, Anna Krasilnikova Sytchkova, Sylvia Boycheva, Angela Piegari

Proceedings Volume 7101, Advances in Optical Thin Films III; 71011Q (2008) https://doi.org/10.1117/12.797665
Event: Optical Systems Design, 2008, Glasgow, Scotland, United Kingdom

Abstract

Aluminium-doped zinc oxide films with 91% transmittance in the visible range and electrical resistivity of the order of 10^-3 Ωcm were fabricated by radio frequency magnetron sputtering in Ar atmosphere starting from a target of ZnO mixed with 2% wt Al₂O₃. A systematic study of the deposition conditions such as substrate temperature, working gas pressure, radio frequency power, magnetron strength, target to substrate distance, etc., was performed when searching for improved electrical and optical performances of the films. Several deposition conditions govern the film characteristics, so that films with same good optical and electrical properties can be obtained by opportunely combining different deposition parameters.

Citation Download Citation

Maria Luisa Grilli, Anna Krasilnikova Sytchkova, Sylvia Boycheva, and Angela Piegari "AZO films prepared by r.f. magnetron sputtering: structural, electrical, and optical properties", Proc. SPIE 7101, Advances in Optical Thin Films III, 71011Q (25 September 2008); https://doi.org/10.1117/12.797665

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