Determining thickness of films on a curved substrate by use of ellipsometric measurement

Chien-Yuan Han; Zhen-You Lee; Yu-Faye Chao

doi:10.1117/12.794178

29 August 2008 Determining thickness of films on a curved substrate by use of ellipsometric measurement

Chien-Yuan Han, Zhen-You Lee, Yu-Faye Chao

Proceedings Volume 7065, Reflection, Scattering, and Diffraction from Surfaces; 706516 (2008) https://doi.org/10.1117/12.794178
Event: Optical Engineering + Applications, 2008, San Diego, California, United States

Abstract

The three intensity polarizer-sample-analyzer imaging ellipsometry is used to measure the ellipsometric parameters (&PSgr;,&Dgr;). In addition to the ellipsometric parameters, we introduce an extra angle &agr; to measure the of the azimuth deviation of polarizer. After careful calibration, we found this deviation can indicate how much the surface normal slanted from the plane; then it can be used to deduce the thickness profile coated on a cylindrical lens. Using this technique, we not only can determine the radius curvature of the curved surface, we also can calculate the thickness of the thin film coated on a curved surface.

Citation Download Citation

Chien-Yuan Han, Zhen-You Lee, and Yu-Faye Chao "Determining thickness of films on a curved substrate by use of ellipsometric measurement", Proc. SPIE 7065, Reflection, Scattering, and Diffraction from Surfaces, 706516 (29 August 2008); https://doi.org/10.1117/12.794178

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