Tool-induced hotspot fixing flow for high volume products

Hiromitsu Mashita; Toshiya Kotani; Fumiharu Nakajima; Hidefumi Mukai; Kazuya Sato; Satoshi Tanaka; Kohji Hashimoto; Soichi Inoue

doi:10.1117/12.793125

20 May 2008 Tool-induced hotspot fixing flow for high volume products

Hiromitsu Mashita, Toshiya Kotani, Fumiharu Nakajima, Hidefumi Mukai, Kazuya Sato, Satoshi Tanaka, Kohji Hashimoto, Soichi Inoue

Author Affiliations +

Proceedings Volume 7028, Photomask and Next-Generation Lithography Mask Technology XV; 70283I (2008) https://doi.org/10.1117/12.793125
Event: Photomask and NGL Mask Technology XV, 2008, Yokohama, Japan

Abstract

Flow of fixing of hot spot induced by optical variation among exposure tools is discussed for quick ramp-up of high volume products. To achieve robust pattern formation for optical variation, following hot spot detection and fixing approaches are introduced: i) at the design stage, hot spot detection within the optical variation space and hot spot fixing by layout modification or OPC optimization, ii) in order to efficiently detect hot spots within the optical variation space, lithography simulation by combinations of optical parameters determined by the design of experiment (DoE), iii) at the manufacturing stage, hot spot fixing by adjustment of optical parameters using the multi-variable optimization to match OPE between the primary and secondary exposure tool.

Citation Download Citation

Hiromitsu Mashita, Toshiya Kotani, Fumiharu Nakajima, Hidefumi Mukai, Kazuya Sato, Satoshi Tanaka, Kohji Hashimoto, and Soichi Inoue "Tool-induced hotspot fixing flow for high volume products", Proc. SPIE 7028, Photomask and Next-Generation Lithography Mask Technology XV, 70283I (20 May 2008); https://doi.org/10.1117/12.793125

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