Optical correlation diagnostics of surfaces

Oleg V. Angelsky; Oleksander P. Maksimyak; Andrey P. Maksimyak; Pavel O. Angelsky

doi:10.1117/12.797207

22 April 2008 Optical correlation diagnostics of surfaces

Oleg V. Angelsky, Oleksander P. Maksimyak, Andrey P. Maksimyak, Pavel O. Angelsky

Proceedings Volume 7008, Eighth International Conference on Correlation Optics; 700815 (2008) https://doi.org/10.1117/12.797207
Event: Eighth International Conference on Correlation Optics, 2007, Chernivsti, Ukraine

Abstract

The feasibilities for optical correlation diagnostics of a rough surface with large surface inhomogeneities by determining the transformations of the longitudinal coherence function of the field scattered by such surface are substantiated and implemented. The algorithm of computer processing of the interferograms for reconstruction of the relief of regular surfaces with resolution 0.5 nm is represented.

Citation Download Citation

Oleg V. Angelsky, Oleksander P. Maksimyak, Andrey P. Maksimyak, and Pavel O. Angelsky "Optical correlation diagnostics of surfaces", Proc. SPIE 7008, Eighth International Conference on Correlation Optics, 700815 (22 April 2008); https://doi.org/10.1117/12.797207

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