Laser applications in the field of MEMS

Gabriel M. Moagar-Poladian; Zsolt Illyefalvi-Vitez; Balint Balogh; Dumitru Ulieru; Antonie Coraci

doi:10.1117/12.801970

29 April 2008 Laser applications in the field of MEMS

Gabriel M. Moagar-Poladian, Zsolt Illyefalvi-Vitez, Balint Balogh, Dumitru Ulieru, Antonie Coraci

Proceedings Volume 7007, INDLAS 2007: Industrial Laser Applications; 70070K (2008) https://doi.org/10.1117/12.801970
Event: INDLAS 2007: Industrial Laser Applications, 2007, Bran, Romania

Abstract

The paper overviews some of the most important applications of lasers in the field of microsystems (MEMS). We present applications from both technology and MEMS testing. Since these applications cover a wide range, the presentation does not aim to offer a thorough, detailed presentation of each of these, but only to underline some of the most important directions and features. We present the respective applications, their working principles, their advantages and their drawbacks. In some cases we present examples of microstructures realized by using laser techniques.

Citation Download Citation

Gabriel M. Moagar-Poladian, Zsolt Illyefalvi-Vitez, Balint Balogh, Dumitru Ulieru, and Antonie Coraci "Laser applications in the field of MEMS", Proc. SPIE 7007, INDLAS 2007: Industrial Laser Applications, 70070K (29 April 2008); https://doi.org/10.1117/12.801970

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