IC-compatible microspectrometer using a planar imaging diffraction grating

S. Grabarnik; A. Emadi; H. Wu; G. De Graaf; G. Vdovin; R. F. Wolffenbuttel

doi:10.1117/12.781103

14 May 2008 IC-compatible microspectrometer using a planar imaging diffraction grating

S. Grabarnik, A. Emadi, H. Wu, G. De Graaf, G. Vdovin, R. F. Wolffenbuttel

Proceedings Volume 6992, Micro-Optics 2008; 699215 (2008) https://doi.org/10.1117/12.781103
Event: SPIE Photonics Europe, 2008, Strasbourg, France

Abstract

The design and performance of a highly miniaturized spectrometer fabricated using MEMS technologies are reported in this paper. Operation is based on an imaging diffraction grating. Minimizing fabrication complexity and assembly of the micromachined optical and electronic parts of the microspectrometer implies a planar design. It consists of two parallel glass plates, which contain all spectrograph components, including slit and diffraction grating, and can be fabricated on a single glass wafer with standard lithography. A simple analytical model for determining spectral resolution from device dimensions was developed and used for finding the optimal parameters of a miniaturized spectrometer as a compromise between size and spectral resolution. The fabricated spectrometer is very compact (11 × 1.5 × 3 mm³), which allowed mounting directly on top of an image sensor. The realized spectrometer features a 6 nm spectral resolution over a 100 nm operating range from 600 nm to 700 nm, which was tested using a Ne light source.

Citation Download Citation

S. Grabarnik, A. Emadi, H. Wu, G. De Graaf, G. Vdovin, and R. F. Wolffenbuttel "IC-compatible microspectrometer using a planar imaging diffraction grating", Proc. SPIE 6992, Micro-Optics 2008, 699215 (14 May 2008); https://doi.org/10.1117/12.781103

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available