A high fill-factor uncooled infrared detector with low noise characteristic

Il Woong Kwon; Jong Eun Kim; Chi Ho Hwang; Yong Soo Lee; Hee Chul Lee

doi:10.1117/12.780506

16 April 2008 A high fill-factor uncooled infrared detector with low noise characteristic

Il Woong Kwon, Jong Eun Kim, Chi Ho Hwang, Yong Soo Lee, Hee Chul Lee

Proceedings Volume 6940, Infrared Technology and Applications XXXIV; 694014 (2008) https://doi.org/10.1117/12.780506
Event: SPIE Defense and Security Symposium, 2008, Orlando, Florida, United States

Abstract

An uncooled capacitive type bimaterial infrared detector with high fill-factor and improved noise characteristic is investigated. Top electrode is insulated from the substrate thermally as well as electrically. Only small dimension (10μmx2μmx0.2μm) of SiO₂ only layer (thermal insulation leg) assures thermal conductance of 1.06x10^-7W/K, while keeping the infrared absorber (top electrode) separated from the bias signal. Due to the decreased thermal isolation leg length, high fill-factor of 0.77 is achieved. The bimaterial leg that connects the infrared absorber to the thermal insulation leg is a 38μm long cantilever structure composed of Al and SiO₂ bi-layer, which has large difference in the thermal expansion coefficient (Al:25ppm/K and SiO2:0.35ppm/K). Bimaterial leg length (38μm) is quite shorter than the previously designed device, resulting in the decreased bending of the bimaterial leg. However, the increased fill-factor reduces temperature fluctuation noise term that is inversely proportional to the absorber area, and it is found by FEM simulation that the enhanced mechanical properties such as spring constant reduce the thermo-mechanical noise term of the proposed device.

Citation Download Citation

Il Woong Kwon, Jong Eun Kim, Chi Ho Hwang, Yong Soo Lee, and Hee Chul Lee "A high fill-factor uncooled infrared detector with low noise characteristic", Proc. SPIE 6940, Infrared Technology and Applications XXXIV, 694014 (16 April 2008); https://doi.org/10.1117/12.780506

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