Paper
18 April 2008 A blended polymer electret-based micro-electronic power generator
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Abstract
Recently, power harvesting technologies for low-power electronic devices have attracted much interest. In this paper, the design and fabrication methods of a micro-electrostatic power generator is presented. This power generator comprises a stator developed using an electret film for charge storage and a rotor covered by an interdigital electrode for electric power generation. The newly developed electret material is made from mixing two solutions. The first solution was made by blending polystyrene (PS) and cycloolefin copolymer (COC). The second solution was obtained by an additive process as polar molecule was added into COC. This unique two solution electret method can easily be integrated and adopted to the micro fabrication process. The charge storage capability of this new electret material was investigated and results showed that low concentration of polystyrene in the blended material will not only have more stable but also higher electrostatic charge than that of pure COC. In addition, the polar molecular additives also improve the electret properties of COC due to micro-cavities formation and the interactions between molecules and polymer. Our newly developed blended electret material has excellent mechanical properties and is easy to use when compared to using Teflon Fluorinated Ethylene Propylene (FEP) and polypropylene (PP). A feasibility study of a micro electrostatic power generator based on our blended electret material was performed. Experimental results demonstrate the feasibility and effectiveness of this new type of micro electrostatic power generator.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wen-Ching Ko, Bor-Shiun Lee, Jia-Lun Chen, Shun-Chi Lin, Wen-Jong Wu, and Chih-Kung Lee "A blended polymer electret-based micro-electronic power generator", Proc. SPIE 6928, Active and Passive Smart Structures and Integrated Systems 2008, 69281V (18 April 2008); https://doi.org/10.1117/12.775982
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Cited by 1 scholarly publication.
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KEYWORDS
Electrodes

Polymers

Molecules

Picosecond phenomena

Temperature metrology

Molecular interactions

Semiconducting wafers

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