Hydrogen sensor using optical reflectance from porous silicon with a palladium thin film

Christopher Lowrie; Susan Earles; M. de Fernandez

doi:10.1117/12.759198

13 February 2008 Hydrogen sensor using optical reflectance from porous silicon with a palladium thin film

Christopher Lowrie, Susan Earles, M. de Fernandez

Proceedings Volume 6898, Silicon Photonics III; 689818 (2008) https://doi.org/10.1117/12.759198
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

Results of a hydrogen sensor based on light scattering from a porous silicon surface coated with a thin palladium film are discussed. Reflected light scattered from the rough surface of porous silicon surface with a thin palladium film is compared before and after exposure to hydrogen gas. After exposure to hydrogen gas the sensor's optical reflectance is decreased indicating the presence of hydrogen.

Citation Download Citation

Christopher Lowrie, Susan Earles, and M. de Fernandez "Hydrogen sensor using optical reflectance from porous silicon with a palladium thin film", Proc. SPIE 6898, Silicon Photonics III, 689818 (13 February 2008); https://doi.org/10.1117/12.759198

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