Paper
23 February 2008 Nano-structuring of polymer surfaces by multi-beam laser interference for application in micro-fluidics
T. Klotzbuecher, A. Radke, A. Tunayar, O. Haverbeck, E. Weinbender, J. Wuesten, A. Toufali, J. Claussen, P. Detemple
Author Affiliations +
Abstract
The interference of three coherent laser beams of a HeCd-laser with a wavelength of 325 nm was used to create a periodic intensity distribution into the photo-resist AZ4562. The beam configuration for the laser beam interference was carefully chosen, so that well defined patterns of two-dimensional periodicity were generated in the photo-resist. Moulding tools were fabricated from the generated nano-structures via electroforming processes, allowing for a fast replication of the nano-structured surfaces via hot embossing. Hot embossed polymers were used to increase the effective surface of micro-fluidic devices like e.g. Polymerase-Chain-Reaction(PCR)-chips. The Nano-structured surfaces were characterized concerning their contact angles when wetted with de-ionized water. It was found that the nano-structures influenced the wetting behaviour of micro-fluidic chip surfaces clearly, especially Polypropylene (PP) surfaces showed a superhydrophobic behaviour.
© (2008) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
T. Klotzbuecher, A. Radke, A. Tunayar, O. Haverbeck, E. Weinbender, J. Wuesten, A. Toufali, J. Claussen, and P. Detemple "Nano-structuring of polymer surfaces by multi-beam laser interference for application in micro-fluidics", Proc. SPIE 6880, Laser-based Micro- and Nanopackaging and Assembly II, 68800F (23 February 2008); https://doi.org/10.1117/12.768348
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KEYWORDS
Polymers

Gold

Lithography

Liquids

Polymethylmethacrylate

Scanning electron microscopy

Surface finishing

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