NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array

Thomas Egloff; Heinrich Grüger; Fabian Zimmer; Harald Schenk; Michael Scholles; Hubert Lakner

doi:10.1117/12.734016

2 October 2007 NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array

Thomas Egloff, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Michael Scholles, Hubert Lakner

Proceedings Volume 6765, Next-Generation Spectroscopic Technologies; 67650I (2007) https://doi.org/10.1117/12.734016
Event: Optics East, 2007, Boston, MA, United States

Abstract

"NIR Hyperspectral Imaging" is a universal tool to measure and control chemical properties of objects. The combination of digital imaging and molecular spectroscopy exhibits a great benefit, especially for in- and on-line analysis. However, a wide use is impeded at present due to the expensive and complex system approach. One reason is the high cost of two dimensional InGaAs detector arrays, another one is the special glass that is used in the near infrared NIR. In this paper a new approach for a NIR Imaging spectrometer is presented. The base of the new Pushbroom Hyperspectral Imager is a micromechanical scanning device with an integrated diffraction grating. This MOEMS device is made in a standard SOI fabrication process developed at Fraunhofer IPMS. For the Hyperspectral Imager, a new all-reflective optical system based on a Schiefspiegler setup has been developed. The simulated optical configuration and the achieved performance of the system will be presented.

Citation Download Citation

Thomas Egloff, Heinrich Grüger, Fabian Zimmer, Harald Schenk, Michael Scholles, and Hubert Lakner "NIR hyperspectral imaging using MOEMS scanning grating chips and linear detector array", Proc. SPIE 6765, Next-Generation Spectroscopic Technologies, 67650I (2 October 2007); https://doi.org/10.1117/12.734016

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