Vanadium oxide-based bolometric infrared spectrometer

Jae Chang Yang; Ho Jung; Seong Ho Kong

doi:10.1117/12.732358

4 October 2007 Vanadium oxide-based bolometric infrared spectrometer

Jae Chang Yang, Ho Jung, Seong Ho Kong

Proceedings Volume 6759, Smart Biomedical and Physiological Sensor Technology V; 675905 (2007) https://doi.org/10.1117/12.732358
Event: Optics East, 2007, Boston, MA, United States

Abstract

The proposed micro-spectrometer consists of multi-slit grating and bolometric IR detector array. The grating is used for dispersion of an incident optical radiation into different wavelength components. The grating pattern is made by metal RIE of aluminum deposited on dielectric membrane, which is fabricated over silicon wafer. The IR detector part adopts a resistive bolometer that changes its resistance when a temperature change occurs. Due to the temperature rise by an incident IR ray, the presence of IR can be detected by knowing the resistance change on the bolometer. For the material of resistive bolometer, vanadium oxide is utilized. Vanadium oxide is adopted for resistive bolometer in this work because of its high TCR.

Citation Download Citation

Jae Chang Yang, Ho Jung, and Seong Ho Kong "Vanadium oxide-based bolometric infrared spectrometer", Proc. SPIE 6759, Smart Biomedical and Physiological Sensor Technology V, 675905 (4 October 2007); https://doi.org/10.1117/12.732358

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