Crystallization of amorphous Si thin films by means of laser and thermal annealing from the viewpoint of energy

Guangsheng Fu; Zechao Deng; Yinglong Wang; Kun Zhang

doi:10.1117/12.783534

14 November 2007 Crystallization of amorphous Si thin films by means of laser and thermal annealing from the viewpoint of energy

Guangsheng Fu, Zechao Deng, Yinglong Wang, Kun Zhang

Author Affiliations +

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 67223F (2007) https://doi.org/10.1117/12.783534
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

Amorphous Silicon (a-Si) films were prepared by pulsed laser ablation in vacuum chamber with base pressure of 2×10^-4 Pa, then the a-Si deposited films were annealed by laser in vacuum chamber under different laser fluence and by heat in the electric furnace under ambient of nitrogen gas with different temperature. The crystallization of a-Si films presented similar process and results. According to similar characteristics, we analyzed the results via energy in order to control the relationship between two ways of crystallization, which may be able to help us to comprehend the mechanism of crystallization and prepare uniform-sized and symmetrical Si nanoparticles by controlling the energy accurately. This method can be readily adapted for mass production of optoelectronic devices ..

Citation Download Citation

Guangsheng Fu, Zechao Deng, Yinglong Wang, and Kun Zhang "Crystallization of amorphous Si thin films by means of laser and thermal annealing from the viewpoint of energy", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 67223F (14 November 2007); https://doi.org/10.1117/12.783534

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