Study on CCOS fabrication technology for super-smooth parabolic surface of light-weight SiC mirror

Qing-lan Xu; Fan Wu; Yongjian Wan; Lin Luo; Pingqi Gao

doi:10.1117/12.783116

14 November 2007 Study on CCOS fabrication technology for super-smooth parabolic surface of light-weight SiC mirror

Qing-lan Xu, Fan Wu, Yongjian Wan, Lin Luo, Pingqi Gao

Proceedings Volume 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies; 672223 (2007) https://doi.org/10.1117/12.783116
Event: 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, 2007, Chengdu, China

Abstract

This paper presents a kind of precision fabrication process integrating CCOS polishing with bowl-feed polishing and small tools for grinding is adopted. By analyzing and testing the parameters of each procedure of optical fabricating process of SiC mirror, Φ140mm pressure-burned lightweight SiC parabolic surface is implemented, and the surface figure with high accuracy (PV=0.16λ. RMS=0.026λ, λ=0.6328μm) and super smooth surface (Surface roughness RMS=0.94nm,Ra=0.61nm) are obtained, thus providing a technology support to optical fabrication of hard material aspheric mirror made by CCOS.

Citation Download Citation

Qing-lan Xu, Fan Wu, Yongjian Wan, Lin Luo, and Pingqi Gao "Study on CCOS fabrication technology for super-smooth parabolic surface of light-weight SiC mirror", Proc. SPIE 6722, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 672223 (14 November 2007); https://doi.org/10.1117/12.783116

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