Performance of newly developed Mg/SiC multilayer mirrors

Takenori Toyota; Go Murakami; Kazuo Yoshioka; Ichiro Yoshikawa

doi:10.1117/12.731422

20 September 2007 Performance of newly developed Mg/SiC multilayer mirrors

Takenori Toyota, Go Murakami, Kazuo Yoshioka, Ichiro Yoshikawa

Proceedings Volume 6705, Advances in X-Ray/EUV Optics and Components II; 67050V (2007) https://doi.org/10.1117/12.731422
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

A multilayer coating mirror of Mo/Si is usually used for space science in the spectral range of extreme ultraviolet (EUV), especially for He-II (30.4 nm) radiation, because it is highly stable under vacuum and atmosphere. It has the fairly high reflectivity of 15-20%. However, the space science community needs the coating of higher reflectivity at 30.4 nm radiation for the future satellite missions, especially for the small satellite (to reduce the size of optics). In this work, for developing a new multilayer mirror for He-II radiation, we report the performance of a multilayer consisting of Mg/SiC and the aging in reflectivity under atmosphere and vacuum.

Citation Download Citation

Takenori Toyota, Go Murakami, Kazuo Yoshioka, and Ichiro Yoshikawa "Performance of newly developed Mg/SiC multilayer mirrors", Proc. SPIE 6705, Advances in X-Ray/EUV Optics and Components II, 67050V (20 September 2007); https://doi.org/10.1117/12.731422

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