Tabletop soft x-ray holography with sub-200-nm spatial resolution

P. W. Wachulak; R. A. Bartels; C. S. Menoni; J. J. Rocca; M. C. Marconi

doi:10.1117/12.732904

11 October 2007 Tabletop soft x-ray holography with sub-200-nm spatial resolution

P. W. Wachulak, R. A. Bartels, C. S. Menoni, J. J. Rocca, M. C. Marconi

Proceedings Volume 6702, Soft X-Ray Lasers and Applications VII; 67020J (2007) https://doi.org/10.1117/12.732904
Event: Optical Engineering + Applications, 2007, San Diego, California, United States

Abstract

Sorf X-ray (SXR) Gabor's holograms recorded with a highly coherent table top λ = 46.9 nm laser were obtained with different numerical apertures yielding a spatial resolution of 164 nm. The holograms were recorded in a high resolution photoresist and digitized with an atomic force microscope. A detailed wavelet decomposition and correlation method was developed to assess the spatial resolution achieved in the numerical reconstruction of the holograms.

Citation Download Citation

P. W. Wachulak, R. A. Bartels, C. S. Menoni, J. J. Rocca, and M. C. Marconi "Tabletop soft x-ray holography with sub-200-nm spatial resolution", Proc. SPIE 6702, Soft X-Ray Lasers and Applications VII, 67020J (11 October 2007); https://doi.org/10.1117/12.732904

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