Nano-precision dynamic motion control

Chi-Ying Lin; Tsu-Chin Tsao

doi:10.1117/12.738689

10 September 2007 Nano-precision dynamic motion control

Chi-Ying Lin, Tsu-Chin Tsao

Proceedings Volume 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing; 66480H (2007) https://doi.org/10.1117/12.738689
Event: NanoScience + Engineering, 2007, San Diego, California, United States

Abstract

This paper presents digital motion control algorithms, real-time implementation, and experimental results for dynamic motion control. A digital control system that includes robust feedback, previewed feedforward, and repetitive control action is implemented on a piezoelectric actuator driven mechanical stage and is demonstrated to achieve nanometer level dynamic precision.

Citation Download Citation

Chi-Ying Lin and Tsu-Chin Tsao "Nano-precision dynamic motion control", Proc. SPIE 6648, Instrumentation, Metrology, and Standards for Nanomanufacturing, 66480H (10 September 2007); https://doi.org/10.1117/12.738689

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