Correlation method for shape measurement of optical surfaces

Antonin Miks; Jiri Novak; Pavel Novak

doi:10.1117/12.726078

18 June 2007 Correlation method for shape measurement of optical surfaces

Antonin Miks, Jiri Novak, Pavel Novak

Author Affiliations +

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66162M (2007) https://doi.org/10.1117/12.726078
Event: Optical Metrology, 2007, Munich, Germany

Abstract

Our work describes a method for testing a shape of optical surfaces (i.e. flat, spherical or aspherical surfaces) using correlation analysis of interference patterns and optimization techniques. The aim of this work is to propose a diverse evaluation method for industrial control of optical surfaces that makes possible to speed up the testing process of optical surfaces in special cases. The proposed method does not require an implementation of a detail analysis of the detected interference field as it is necessary with existing interferometric methods. The deviation of the tested optical surface from its nominal shape can be characterized by the correlation coefficient between the tested wave field and reference wave field that corresponds to the nominal shape of surface. The shape of the tested optical surface and the deviation from its nominal shape can be calculated by optimization of the correlation coefficient.

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Antonin Miks, Jiri Novak, and Pavel Novak "Correlation method for shape measurement of optical surfaces", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162M (18 June 2007); https://doi.org/10.1117/12.726078

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