New technique for flexible and rapid measurement of precision aspheres

Eugenio Garbusi; Christof Pruss; Jan Liesener; Wolfgang Osten

doi:10.1117/12.727898

18 June 2007 New technique for flexible and rapid measurement of precision aspheres

Eugenio Garbusi, Christof Pruss, Jan Liesener, Wolfgang Osten

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 661629 (2007) https://doi.org/10.1117/12.727898
Event: Optical Metrology, 2007, Munich, Germany

Abstract

A new interferometric technique for the measurement of aspheric elements based on multiple test beams is presented. By means of an array of sources (Point Source Array) an aspheric surface is illuminated under different angles which allow the measurement of the zones where the local gradient of the test piece is compensated. One of the main advantages of the system is that the measurement process is performed in parallel (many sources are used at the same time) thus requiring extremely short measurement time in comparison with other available subaperture testing techniques. Another important aspect is that the asphere stays in the same position during the whole process; there are no mechanical movements of the test part involved. The technique allows the measurement of strong aspheric elements with departures from the best fit sphere up to ±10°. The method was developed to obtain accuracies of up to λ/30 and better. Simulations and first experimental results are presented.

Citation Download Citation

Eugenio Garbusi, Christof Pruss, Jan Liesener, and Wolfgang Osten "New technique for flexible and rapid measurement of precision aspheres", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 661629 (18 June 2007); https://doi.org/10.1117/12.727898

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available