Cavity ring down and vacuum UV spectroscopy: applications for radical absolute density measurements in plasma

Pavel Veis; Peter Macko; Juraj Jašik

doi:10.1117/12.739366

12 April 2007 Cavity ring down and vacuum UV spectroscopy: applications for radical absolute density measurements in plasma

Pavel Veis, Peter Macko, Juraj Jašik

Author Affiliations +

Proceedings Volume 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics; 660905 (2007) https://doi.org/10.1117/12.739366
Event: 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 2006, Liberec, Czech Republic

Abstract

Survey of several experimental techniques applied for absolute density measurements of atoms and radicals in plasma is presented. It includes the Vacuum Ultraviolet Absorption Spectroscopy, Actinometry and Emission Spectroscopy, Laser Absorption Spectroscopy and highly sensitive Cavity Ring-Down Spectroscopy. Performances and operation procedures of these techniques are illustrated.

Citation Download Citation

Pavel Veis, Peter Macko, and Juraj Jašik "Cavity ring down and vacuum UV spectroscopy: applications for radical absolute density measurements in plasma", Proc. SPIE 6609, 15th Czech-Polish-Slovak Conference on Wave and Quantum Aspects of Contemporary Optics, 660905 (12 April 2007); https://doi.org/10.1117/12.739366

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available