Data exploder for variable shaped beam exposure

John Nogatch; Hartmut Kirsch; Jun Shi

doi:10.1117/12.728946

11 May 2007 Data exploder for variable shaped beam exposure

John Nogatch, Hartmut Kirsch, Jun Shi

Proceedings Volume 6607, Photomask and Next-Generation Lithography Mask Technology XIV; 66070W (2007) https://doi.org/10.1117/12.728946
Event: Photomask and Next-Generation Lithography Mask Technology XIV, 2007, Yokohama, Japan

Abstract

As the industry moves to 45nm and beyond, rapidly increasing file sizes are an obstacle to achieving fast turnaround time for mask manufacturing. Conventional Mask Data Preparation (MDP) requires the production of large files, in a format specific to each make and model of E-beam tool. An alternative approach extracts the data from a data file already present in the MDP flow, and provides it directly to the E-beam tool. This extraction is called a "Data Exploder", because the output data volume can be larger than the input data. Exploding the data in real-time saves the time required to write and then read large disk files. The Data Exploder is compatible with multithread and multiprocess parallel reading. The practical application and limitations of the Data Exploder are described, including throughput performance, requirements for disk storage, network interconnect, and CPU configurations.

Citation Download Citation

John Nogatch, Hartmut Kirsch, and Jun Shi "Data exploder for variable shaped beam exposure", Proc. SPIE 6607, Photomask and Next-Generation Lithography Mask Technology XIV, 66070W (11 May 2007); https://doi.org/10.1117/12.728946

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available