Substrate effects on the characteristics of haze defect formation on the photomask surface under exposure condition

Jaehyuck Choi; Han-shin Lee; Jin-sik Jung; Byung Cheol Cha; Sang-Gyun Woo; HanKu Cho

doi:10.1117/12.728922

29 May 2007 Substrate effects on the characteristics of haze defect formation on the photomask surface under exposure condition

Jaehyuck Choi, Han-shin Lee, Jin-sik Jung, Byung Cheol Cha, Sang-Gyun Woo, HanKu Cho

Author Affiliations +

Proceedings Volume 6607, Photomask and Next-Generation Lithography Mask Technology XIV; 660709 (2007) https://doi.org/10.1117/12.728922
Event: Photomask and Next-Generation Lithography Mask Technology XIV, 2007, Yokohama, Japan

Abstract

We have explored substrate effects upon the characteristics of haze creation on the mask surface by performing surface analysis for each of Cr, MoSiON, and Qz substrates of the mask before and after laser exposure. We found out chemical ions such as sulfur and ammonium ions should have different mobility behavior towards haze defect creation depending on each substrate during laser exposure. This fact can partially clarify the reason why haze occurrence on the mask in real mass production mainly comes up with Qz substrate surface even though it has the lowest level of chemical residue on it. We also realized that sulfur ions are penetrating into a sub layer of Qz substrate and even deeper during laser exposure, which signifies that we may have to remove a thin surface layer from Qz substrate to further improve haze issue from the current standpoint.

Citation Download Citation

Jaehyuck Choi, Han-shin Lee, Jin-sik Jung, Byung Cheol Cha, Sang-Gyun Woo, and HanKu Cho "Substrate effects on the characteristics of haze defect formation on the photomask surface under exposure condition", Proc. SPIE 6607, Photomask and Next-Generation Lithography Mask Technology XIV, 660709 (29 May 2007); https://doi.org/10.1117/12.728922

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available